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Showing results 1 to 3 of 3

Issue Date	Title Author(s) Journal	View
2013-01	Atomic Layer Deposition of Ru Thin Films Using a Ru(0) Metallorganic Precursor and O-2 Hong, Tae Eun ; Choi, Sang-Hyeok ; Yeo, Seungmin ; Park, Ji-Yoon ; Kim, Soo-Hyun ; Cheon, Taehoon ; Kim, Hoon ; Kim, Min-Kyu ; Kim, Hyungjun ECS Journal of Solid State Science and Technology, v.2, no.3, pp.P47 - P53, 2013-01	429
2013-11	Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization Yeo, Seungmin ; Choi, Sang-Hyeok ; Park, Ji-Yoon ; Kim, Soo-Hyun ; Cheon, Taehoon ; Lim, Byoung-Yong ; Kim, Sunjung Elsevier BV, 2013-11	592
2014-10-15	Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition Park, Ji-Yoon ; Yeo, Seungmin ; Cheon, Taehoon ; Kim, Soo-Hyun ; Kim, Min-Kyu ; Kim, Hyungjun ; Hong, Tae Eun ; Lee, Do-Joong Journal of Alloys and Compounds, v.610, pp.529 - 539, 2014-10-15	594

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